2011 : Sintesis ZnO: Al Sebagai Bahan Transparent Conducting Oxide (TCO) dengan Metode Spray Pyrolysis

Prof.Dr.Ir. Sugeng Winardi M.Eng

Abstract

ZnO:Al particles are widely used as semiconductor material in various fields of technology, such as transparent conducting oxide (TCO). Synthesis of ZnO:Al particles using spray pyrolysis method has many advantages. The generated particles are relatively homogenous size distribution, spherical, and easily adjusted the particle size in range nano-submicrometer. Here, we studied the effect of doping concentration (1-4 at.%), operation temperature (500-900°C) and carrier gas flow rate (2-4 L/min) on the characteristics of the generated particles including morphology, crystallinity, and transparancy. In order to analyse the morphology, crystallinity, and transparancy of the generated particles, we used Scanning Electron Microscope (SEM), X-ray Diffraction (XRD), dan UV-Vis spectrophotometer, respectively. The optimum condition for the highest crystallinity and transparancy was obtained by partices synthesized using doping concentration of 2 at.%, furnace of 900°C and carrier gas flow rate of 2 liter/minute Keywords: Al doped ZnO, transparent conducting oxide, particle morphology, crystalline size, transparancy